INFICON IC6 Thin Film Deposition Controller - Manual (Page 282)

15 - 12
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
Can’t Delete: Co-Dep An attempt was made to delete one layer of
a co-dep pair of layers. The message is
removed from
the screen on
any key press or
if another
transient
message
appears Process 49
Can’t Insert: Co-Dep An attempt was made to insert layers
between a co-dep pair of layers or to insert
only one layer of a co-dep pair. Process 50
Can’t Empty Active
Process An attempt was made to empty or default
the Active process. Process 51
Layers Copied After Insert Layers is successful. Process 52
Logic Edit In Progress Key press (STOP,RESET,START, MENU)
while in logic edit mode: Logic Edit 53
No Paren on Empty
Term Parentheses are not allowed on an empty
term. Logic Edit 54
No Left Paren on Last
Term. Cannot insert Left (opening) parenthesis
on the last term. Logic Edit 55
Select an Event to Edit Attempt to edit a non-event assigned label. Logic Edit 56
Select an Action to Edit Attempt to edit a non-action assigned label. Logic Edit 57
Select an Event to
Delete Attempt to delete a non-event assigned
label. Logic Edit 58
Select an Action to
Delete Attempt to delete a non-action assigned
label. Logic Edit 59
Max Terms: Cannot
Insert An attempt was made to enter an equation
with more then the allowed event or action
terms. Logic Edit 60
Cannot Negate Empty
Term Attempt to negate an empty term. Logic Edit 61
Meas. Board Comm
Error Bad communications with the meaurement
card. All 62
No Switch: No XIU No XIU attached, cannot do a switch. All 63
In Crucible Switch An attempt was made to navigate or
change a parameter in the Source
Maintenance screen while a crucible
switch was in process. Source
Maintenance * Not
available
Maintenance Enabled An attempt was made to leave a
Maintenance screen while Auto Tune,
Cross Talk Calibrate or Source
Maintenance was enabled Source
Maintenance Not
available
from
Remote
Comm
Table 15-5 Transient messages (continued)
Transient Message Set Clear Screen Remote
Comm.
Encodes