INFICON IC6 Thin Film Deposition Controller - Manual (Page 194)

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IC6 Operating Manual
10.4.15 IC6 Action List
Actions are triggered in the Logic Statement THEN section. Logic codes are used
in the remote communication query and update commands. Some actions that
require a numeric may act on all items by entering a zero, as noted in
Table 10-8 .
Test 0x7D 0x83
AutoTune 0x7E 0x82
Rate Dev(iation)
Err(or)
0x7F 0x81
Note 1: Seconds are entered via remote communications as tenths of seconds. Seconds are
entered by keyboard as whole numbers.
Note 2: The time is entered via remote communications as whole minutes. 99 hours = 5940
minutes, so 99 hours + 59 minutes = 5999 minutes maximum. The time entered by keyboard is in
hours and minutes.
Note 3: Maximum number of minutes is 59. The entry of 00:65 is invalid. That time can be entered
as 01:05.
Note 4: Thick Sum will be sent as an integer Angstroms (the number multiplied by 1000).
Table 10-7 Event list (continued)
Events 1st
numeric
(1 Byte)
(XXX)
Min Max 2nd
numeric
(Integer)
(YYY)
Min Max Logic
Code
Logic
Code
Negated
Table 10-8 Action list
Actions Numeric
(Byte)
Min Max Logic Code
Extern Out On XXX Output # 1 38 0x41
Extern Out Off XXX Output # 1 38 0x42
Select Process XXX Process # 1 50 0x43
Stop 0x44
Start 0x45
Reset 0x46
Suspend XXX
Material # 0 32
0x47
Zero Deposit Time XXX 0x48
Zero Thick XXX 0x49
Trig Fnl Thick XXX 0x4A
Continue Dep XXX 0X4B
Start Deposit XXX 0x4C
Go to NonDep XXX 0x4D
Go to PostDep XXX 0x4E