INFICON IC6 Thin Film Deposition Controller - Manual (Page 128)

5 - 20
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
RateWatcher OPTION. . . . . . . . . . . No (0), Yes (1)
Default is No (0) which disables the function and greys out the Time and
Accuracy parameters.
RateWatcher TIME . . . . . . . . . . . . . 00:00 to 99:59 min:s
Ratewatcher Time determines the time interval between sample periods. The
crystal shutter relay is in its normal state during this time. Values range from
00:00 to 99:59 minutes:seconds. The default value is 00:00, which disables the
function.
During a Rate Ramp, the Sample and Hold feature is inactive; the crystal
shutter is open and the rate is controlled by the crystal.
RateWatcher ACCURACY . . . . . . . 1 to 99%
During the rate sampling period, the deposition rate is measured by the crystal;
source power control is active. When the rate is within the desired accuracy
continuously for five seconds, the shutter is closed and the deposition state
returns to HOLD. The minimum accuracy is 1% or 0.1 Å/s, whichever is greater.
Values range from 1 to 99%. The default value is 5%