INFICON IC6 Thin Film Deposition Controller User Manual

Page 158

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IC6 Operating Manual

LAYER ###

Sets the logic condition to be true at the beginning of Layer ### (when Layer
### is in the READY state at the beginning of a Process or when STARTed
during a Process). The condition remains true until the layer is no longer active.
Numeric inputs range from 1 to 200 or the maximum number of defined layers.

LAYER END ###

Sets the logic condition to be true when the specified Layer enters the IDLE
state. The condition remains true until a START or a STOP/RESET command
is received. Numeric inputs range from 0 to 200, or the maximum number of
defined layers, with 0 indicating any layer.

NOTE: If Auto Start Next is enabled, this logic event is only triggered at the End

of Process and not between each subsequent layer.

LIFE > # ##

Sets the logic condition to be true whenever the Life value ## on sensor # is
greater than the value entered for ##, which can be 1 to 99, for at least 5
seconds. The condition remains true until the Life value is less than ## for at
least 5 seconds. Numeric inputs for sensor # range from 0 through 8 (0 for any
sensor).

MANUAL

Sets the logic condition to be true when the Manual state is entered. The
condition remains true until leaving the Manual state, and when a
STOP/RESET or a STOP/START sequence is executed.

MATERIAL ##

Sets the logic condition to be true whenever a Layer containing Material ## is
in the READY state at the beginning of a Process or when it is STARTed during
a Process. The condition remains true until the material is no longer active and
can stay true across layers if the same material is used in 2 or more
consecutive layers. Values for ## range from 1 to 32 or the maximum number
of defined materials.

MATERIAL END ##

Sets the logic condition to be true when the layer for the specified Material ##
enters the IDLE state. The condition remains true until a START or a
STOP/RESET command is received. Numeric inputs range from 0 to 32 or the
maximum number of defined materials, with 0 indicating any material.

NOTE: If Auto Start Next is enabled, this logic event is only triggered at the End

of Process and not between each subsequent layer.