INFICON IC6 Thin Film Deposition Controller User Manual

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IC6 Operating Manual

TIME LIMIT

Sets the logic condition to be true once the Time Limit is achieved. The
condition remains true until the Layer which has achieved Time Limit enters the
IDLE state or until a STOP/RESET sequence is executed.

TIME POWER

Sets the logic condition to be true upon entering a Time Power state. The
condition remains true until the end of the DEPOSIT state.

TIMER MINUTES # HH:MM

Sets the logic condition to be true when the designated timer # (1 to 20)
reaches the specified number of hours and minutes HH:MM, 00:00 to 99:59.

TIMER SECONDS # ###

Sets the logic condition to be true when the designated Timer # (1 to 20)
reaches the specified time expressed in seconds, sss.s, 0 to 999.9.

XFER SENS IN USE

Sets the logic condition to be true while a transfer sensor is in use. The
condition remains true until a transfer sensor is no longer active.

XTAL FAIL #

Sets the logic condition to be true as long as there is a Crystal Fail on sensor
#. In the case of a multi-position sensor, a Crystal Fail occurs when the last
available crystal fails and no backup sensor is available. The logic condition
remains false if the XTL FL INHB Action is active (ON). The condition remains
true until a working crystal is input to the appropriate sensor. Numeric inputs for
sensor # range from 0 through 8 (0 for any sensor).

XTAL SWITCHING #

Sets the logic condition to be true while a crystal switch is taking place on
sensor #. The condition remains true until the crystal switch is completed.
Numeric inputs for sensor # range from 0 through 8 (0 for any sensor).