7 troubleshooting guide, Caution – INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
15.7 Troubleshooting Guide
If the IC6 fails to work, or appears to have diminished performance, the following
Symptom/Cause/Remedy charts may be helpful.
CAUTION
There are no user serviceable components within the IC6
case.
Potentially lethal voltages are present when the line cord,
Inputs or Outputs are connected.
Refer all maintenance to qualified personnel.
This IC6 contains delicate circuitry which is susceptible
to transients. Disconnect the line cord whenever making
any interface connections. Refer all maintenance to
qualified personnel.
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