INFICON IC6 Thin Film Deposition Controller - Manual (Page 216)

10 - 46
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
6
(0x06)
Current
Z-Ratio 4 or 32 or
loat>
t>
Z-Ratio currently in use.
7
(0x07)
Anharmonic
Frequency
8 or 64 or
ong>
g>
One long integer for each sensor. Unconverted, to
convert to Hz, multiply by 0.000873114913702011
8
(0x08)
Anharmonic
Activity
4 or 32 or
Integer>
One Integer for each sensor
Range 0 - 999
9
(0x09)
New crystal
Frequency
16 or 128 or
< Long>x16
Returns the Fundamental and Anharmonic "NEW"
crystal frequencies
10
(0x1a)
LCQ value 4 or 32 or
loat>
t>
Returns the LCQ running value
(for factory diagnostic use only)
11
(0x0b)
N/A
12
(0x0c)
Sensor
Thickness
4 or 32 or
loat>
t>
kÅ
Returns sensor thickness
13
(0x0d)
Sensor Raw
Rate
4 or 32 or
loat>
t>
Å/s
Returns sensor raw rate. If sensor is not in use,
response will be 0 Å/s
Table 10-14 Status sensor (continued)
SS
Command
ID
Description
Number of
bytes in
the
response
Data Returned Notes