5 sputtering sensor – INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
15.8.5 Sputtering Sensor
Observe the general precautions for replacing crystals and follow the instructions
below to replace the crystal in a sputtering sensor.
1
Grip the body assembly with your fingers and pull it straight out to separate it
from the water-cooled front cover. (You may have to disconnect the sensor
cable in order to separate the parts.) See
2
Pull the crystal holder straight out from the front of the body assembly.
3
Remove the ceramic retainer from the crystal holder by pulling it straight out
with the crystal snatcher (see
4
Turn the crystal holder over so that the crystal drops out.
5
Install a new crystal into the crystal holder with the patterned electrode facing
the back and contacting the leaf springs on the ceramic retainer.
6
Put the ceramic retainer back into the crystal holder and put the holder into the
body assembly of the sensor.
7
Align the position of the body assembly so that the connector matches with the
notch on the front cover of the sensor. Snap the two parts together. Reconnect
the sensor cable if it has been disconnected.
Figure 15-5 Sputtering crystal sensor
Body Assembly
IPN 750-619-G1
In-Vacuum Cable Assembly
(29 in.) IPN 007-044
Ceramic Retainer
IPN 007-023
Crystal
IPN 008-009-G10
(Silver)
Crystal Holder
IPN 007-049
Sensor
Front Cover
IPN 007-047