INFICON IC6 Thin Film Deposition Controller User Manual

Page 30

1 - 10

IC6 Operating Manual

Idle Ramp. . . . . . . . . . . . . . . . . . . . . 1 per Source

Idle Power . . . . . . . . . . . . . . . . . 0.00 to 99.99%

Idle Ramp Time . . . . . . . . . . . . . 00:00 to 99:59 min:s

Rate . . . . . . . . . . . . . . . . . . . . . . . . . 0.000 to 999.9 Å/s

Time Limit (in Deposit) . . . . . . . . . . . 00:00 to 99:59 min:s

Rate Filter Time . . . . . . . . . . . . . . . . 0.1, 0.4, 1.0, 4.0, or 10.0, 20.0, 30.0 s

Time Power Averaging Time . . . . . . 0 to 30 minutes

Ion Assist Deposit . . . . . . . . . . . . . . Yes/No

On Final Thickness . . . . . . . . . . . . . Continue, Post-Dep(osit),

NonDep(osit)Cont(rol)

New Rate while in Deposit . . . . . . . . 2 Rate Ramps per Material

New Rate 1 or 2 . . . . . . . . . . . . . 0.000 to 999.9 Å/s

Start Ramp 1 or 2 . . . . . . . . . . . . 0.000 to 999.9 kÅ

Ramp Time 1 or 2. . . . . . . . . . . . 00:00 to 99:59 min:s

RateWatcher® . . . . . . . . . . . . . . . . Sample and Hold Feature

(RateWatcher) Option. . . . . . . . . Yes/No

(RateWatcher) Time . . . . . . . . . . 00:00 to 99:59 min:s

(RateWatcher) Accuracy . . . . . . 1 to 99%

Multipoint . . . . . . . . . . . . . . . . . . . . . Yes/No (average up to 8 sensors)

Aggregate Multiply . . . . . . . . . . . . . . Yes/No

(Sensor) Failure Action . . . . . . . . . . Unused, PostD(e)p(osit), Stop, Susp(e)nd,

TimeP(o)w(er)

(Sensor) Failure Trigger . . . . . . . . . . OnFail (when this sensor fails) or Last (when

the last sensor fails)

(Sensor) Weight . . . . . . . . . . . . . . . . 1 to 400.0%

(Sensor) Tooling (Factor) . . . . . . . . . 1.0 to 999.9%

CrystalTwo Tooling . . . . . . . . . . . . . . 1.0 to 999.9%

Cal(ibration) Thickness . . . . . . . . . . 0.000 to 999.9 kÅ (for Crosstalk correction)

CrystalSix (XtalSix) and Crystal12 (Xtal12) sensor selections to specify a subset of
available crystal positions:

Xtal Position First . . . . . . . . . . . . 0 to 6 (XtalSix) or 12 (Xtal12)

Xtal Position Last . . . . . . . . . . . . 0 to 6 (XtalSix) or 12 (Xtal12)