INFICON IC6 Thin Film Deposition Controller - Manual (Page 277)

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IC6 Operating Manual
15.4 STOP messages
When the IC6 goes into STOP, a cause of stop message appears on the line below
STOP. Some of these messages will have designators to indicate the Material,
Source or Sensor that caused the Stop.
Table 15-4 indicates which messages have
designators and what the designator indicates.
Table 15-4 Stop messages
Cause of STOP
Message Set Clear Screen Remote
Comm.
Encodes
Max Power X Maximum power was reached
and held there for more then 5
seconds and the material
parameter Max Power Option is
set to Stop on Max Power.
X = Material A RESET command
received from the keyboard,
digital input, remote
communications or a Logic
action.
A Start, if the condition
causing the stop has been
cleared and the process can
resume. All 1
Crystal Fail X There was a crystal failure and
the material parameter Failure
Action is set to stop on fail.
X = Sensor. 2
Hand Controller STOP command was received
from the handheld controller. 3
Front Panel Keyboard STOP key was
pressed. 4
Communication A STOP command was received
from remote communications. 5
Crucible Fail X The IC6 failed to detect a good
crucible in the time allowed.
X = Source 6
Switcher Fail X A crystal switch failed.
X = Sensor 7
Logic Eqn #N A STOP command was received
from logic statement number #. 8
No Source DAC A layer tried to start without a
source DAC programmed. 9
Power Loss The IC6 lost power. 10
Source Conflict A layer is attempting to start with
a source that is already in use. 11
Sensor Conflict X The process is trying to enter the
Deposit state with two layers
using the same sensor.
X = Sensor. 12
Shutter Fail X The desired Rate Accuracy has
not been achieved in the alotted
time in Shutter Delay.
X = Material. 13