INFICON IC6 Thin Film Deposition Controller - Manual (Page 29)

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IC6 Operating Manual
1.4.3.4 Material Parameters
32 materials can be specified and given unique names (15 character max.).
Density . . . . . . . . . . . . . . . . . . . . . . . 0.100 to 99.999 g/cm 3
Z-ratio . . . . . . . . . . . . . . . . . . . . . . . . 0.100 to 15.000
Master Tooling . . . . . . . . . . . . . . . . . 1.0 to 999.9%
Control Loop types . . . . . . . . . . . . . . Non-PID, PI, PID
Process Gain . . . . . . . . . . . . . . . . . . 0.01 to 999.99 Å/s/%Power
Time Constant . . . . . . . . . . . . . . . . . 0.010 to 9999.99 s
Dead Time . . . . . . . . . . . . . . . . . . . . 0.010 to 9999.99 s
Source . . . . . . . . . . . . . . . . . . . . . . . 1 to 6
Maximum Source Power . . . . . . . . . 0.01 to 99.99%
Minimum Source Power . . . . . . . . . . 0.00 to 99.98%
Maximum Power Option . . . . . . . . . . Continue, Post-Dep(osition), Stop Proc(ess),
Suspend Mat(erial) — can be selected for
each Material individually
Power Ramps . . . . . . . . . . . . . . . . . . 3 per Material
Power Level . . . . . . . . . . . . . . . . 0.00 to 99.99%
Rise Time . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
Soak Time. . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
Auto Soak 2 . . . . . . . . . . . . . . . . . . . Yes / No
Deposit After Pre-Deposit. . . . . . . . . Yes / No
Yes = go to Deposit
No = go to Non-Deposit Rate Control
(Control) Delay Option . . . . . . . . . . . None, Shutter, Control, Both
Control Delay Time. . . . . . . . . . . . . . 00:00 to 99:59 min:s
Shutter Delay Accur(acy) . . . . . . . . . 1 to 99%
Transfer Sensor . . . . . . . . . . . . . . . . 0 to 8
Transfer Tooling . . . . . . . . . . . . . . . . 1 to 999.9%
Feed Power . . . . . . . . . . . . . . . . . . . 0.00 to 99.99%
Feed Ramp Time . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
Feed Time . . . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s