INFICON IC6 Thin Film Deposition Controller - Manual (Page 199)

10 - 29
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
38
(0x26)
On Final Thickness 0/ 2/ 1 Encode 0 = Continue, 1 = Post-Dep
2 = NonDepCont
39
(0x27)
Ramp 1 Rate
(Å/s)
0/ 999.9/ 0 REAL_
4F31
40
(0x28)
Start Ramp 1
(KÅ)
0/ 999.999/
0
REAL_
4F31
Value must be less than Start Ramp 2 thickness value if
Start Ramp 2 thickness value is non-zero.
41
(0x29)
Ramp 1 Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note
42
(0x2a)
Ramp 2 Rate
(Å/s)
0/ 999.9/ 0 REAL_
4F31
43
(0x2b)
Start Ramp 2
(KÅ)
0/ 999.999/
0
REAL_
4F31
Value must be greater than Start Ramp 1 thickness value.
44
(0x2c)
Ramp 2 Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note
45
(0x2d)
RateWatcher Option 0/ 1/ 0 Encode 0 = No, 1 = Yes
46
(0x2e)
RateWatcher Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note Grey font unless
RateWatcher option set to
Yes.
47
(0x2f)
RateWatcher
Accuracy (%)
1/ 99/ 5 Integer
48
(0x30)
Multipoint 0/ 1/ 0 Encode 0 = No, 1 = Yes Update not allowed if
material is running.
49
(0x31)
Aggregate Multiplier 0/ 1/ 0 Encode 0 = No, 1 = Yes Visible only if Multipoint is
set to Yes
Table 10-9 Material parameters (continued)
QM UM
Cmd ID Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type Notes
Update Restrictions
and Display Notes