INFICON IC6 Thin Film Deposition Controller User Manual
Page 301
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IC6 Operating Manual
15.9 Crystal Sensor Emulator
IPN 760-601-G1 or 760-601-G2
NOTE: Crystal Sensor Emulator 760-601-G1 (obsolete) is not compatible for use
with an IC6, IC5 and IC4. 760-601-G2 is fully compatible with all Thin Film
Deposition Controllers.
The Crystal Sensor Emulator option is used in conjunction with the Thin Film
Deposition Controller to rapidly diagnose problems with the Deposition Controller's
measurement system. See
Figure 15-7 Crystal sensor emulator
The Crystal Sensor Emulator may be attached at various points in the
measurement system, from the oscillator to the sensor head. It provides a known
good monitor crystal with known good electrical connections. Using the emulator
and the controller in a systematic manner provides a fast means of isolating
measurement system, cable, or sensor problems. See
.
Figure 15-8 Crystal sensor emulator attachment points
CAUTION
This product is designed as a diagnostic tool, and is not
intended for use in vacuum. Do not leave the Crystal
Sensor Emulator installed in the vacuum system during
processing.
Female
BNC
Connector
Female
Microdot
Connector
Sensor
Cover
Connector
Thin Film
Controller
Crystal Interface
Unit (Oscillator)
Sensor Head
A
B
C