INFICON IC6 Thin Film Deposition Controller - Manual (Page 263)

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IC6 Operating Manual
12.7.1 Source Maintenance Parameters
SOURCE MAINTENANCE . . . . . . . Enabled/Disabled
IC6 must be in Ready to Enable and must be Disabled to return to normal
operation. Default is Disabled.
MATERIAL NUMBER . . . . . . . . . . . 1 to 32
While in Maint Stop, select the material associated with the source or sensor to
be checked. Material cannot be changed while in Manual.
12.7.1.1 Crucible Rotation
If the IC6 has been configured for a multi-position crucible indexer, pressing the F1
key will advance it to the next position. Setting the Switch to Crucible parameter to
one of the positions before pressing F1 will activate the programmed crucible
indexer outputs to rotate to the specified position.
The F1 key is greyed out for a single position crucible to indicate it is not active.
12.7.1.2 Toggle Sensor and Source Shutter
Press the F2 key to toggle all sensor shutters associated with this material.
Press the F3 key to toggle the source shutter for this material’s source.
12.7.1.3 Start/Stop Manual Power
Press the F4 key to start Manual mode. Once in manual mode, use the optional
hand-held controller to increase or decrease the power.