6 material – INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
3.3.6 Material
This display is organized into eight sub pages accessible thru the Select Menu
described below.
See
for programming details and screen displays.
3.3.6.1 Overview Page
The Material Overview display, see
, shows all 32 available materials.
Materials are initially shown as Material 1 to Material 32. Once a chemical formula
or other name has been assigned, that name will be shown. See
Material Definition, on page 5-2
Figure 3-12 Material overview page
3.3.6.2 Source Page
The Material Source page allows entering or editing Density, Z-Ratio, Control Loop
type and associated control loop parameters. One of the six Source BNC analog
control outputs is selected and the operating limits for that output such as Min. and
Max Power are defined here. If desired, a Recorder Output (one of the unused
standard six or optional additional six analog outputs) can be selected for Rate,
Thickness, Rate Deviation or Power and the full scale Range value selected. See
section 5.1.3, Material Screen Source Page Parameters, on page 5-3
.
3.3.6.3 Sensor Page
The Material Sensor page, see
, allows selecting the Tooling factor and
which sensor (Multipoint Yes/No) or group of sensors (up to eight) is used or are to
be averaged together to control the deposition rate and final thickness for the