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INFICON IC6 Thin Film Deposition Controller User Manual

Page 197

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IC6 Operating Manual

10

(0x0a)

Minimum Power

(%)

0.00/ 99.98/

0.0

REAL_4X2

11

(0x0b)

Max Power Option

0/ 3/ 2

Encode

0 = Continue

1 = Post-Dep

2 = Stop Proc

3 = Suspend Mat

12

(0x0c)

PreCond Soak Power

(%)

0.0/ 99.99/

0.0

REAL_4X2

13

(0x0d)

PreCond Rise Time

(seconds)

(mm:ss)

0/ 5999/ 0

0/ 99:59/ 0

Time

Time Note: Times are

displayed as mm:ss. Times are

stored as seconds.

The maximum number of

seconds is 5999. This would

be displayed as 99:59.

14

(0x0e)

PreCond Soak Time

(seconds)

(mm:ss)

0/ 5999/ 0

0/ 99:59/ 0

Time

15

(0x0f)

Soak Power 1

%

0.0/ 99.99/

0.0

REAL_4X2

16

(0x10)

Rise Time 1

(seconds)

(mm:ss)

0/ 5999/ 0

0/ 99:59/ 0

Time

See Time Note

17

(0x11)

Soak Time 1

(seconds)

(mm:ss)

0/ 5999/ 0

0/ 99:59/ 0

Time

See Time Note

18

(0x12)

Soak Power 2

%

0.0/ 99.99/

0.0

REAL_4X2

19

(0x13)

Rise Time 2

(seconds)

(mm:ss)

0/ 5999/ 0

0/ 99:59/ 0

Time

See Time Note

20

(0x14)

Soak Time 2

(seconds)

(mm:ss)

0/ 5999/ 0

0/ 99:59/ 0

Time

21

(0x15)

Auto Soak 2

0/ 1/ 0

Encode

0 = No

1 = Yes

22

(0x16)

Dep After Pre-Dep

0/ 1/ 1

Encode

0 = No

1 = Yes

23

(0x17)

Delay Option

0/ 3/ 0

Encode

0 = None, 1 = Shutter

2 = Control, 3 = Both

Table 10-9 Material parameters (continued)

QM UM
Cmd ID

Name

(Units)

Range:

Low Limit/

High Limit/

Default

Data Type

Notes

Update Restrictions

and Display Notes