INFICON IC6 Thin Film Deposition Controller User Manual
Page 197

10 - 27
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
10
(0x0a)
Minimum Power
(%)
0.00/ 99.98/
0.0
REAL_4X2
11
(0x0b)
Max Power Option
0/ 3/ 2
Encode
0 = Continue
1 = Post-Dep
2 = Stop Proc
3 = Suspend Mat
12
(0x0c)
PreCond Soak Power
(%)
0.0/ 99.99/
0.0
REAL_4X2
13
(0x0d)
PreCond Rise Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
Time Note: Times are
displayed as mm:ss. Times are
stored as seconds.
The maximum number of
seconds is 5999. This would
be displayed as 99:59.
14
(0x0e)
PreCond Soak Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
15
(0x0f)
Soak Power 1
%
0.0/ 99.99/
0.0
REAL_4X2
16
(0x10)
Rise Time 1
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note
17
(0x11)
Soak Time 1
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note
18
(0x12)
Soak Power 2
%
0.0/ 99.99/
0.0
REAL_4X2
19
(0x13)
Rise Time 2
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note
20
(0x14)
Soak Time 2
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
21
(0x15)
Auto Soak 2
0/ 1/ 0
Encode
0 = No
1 = Yes
22
(0x16)
Dep After Pre-Dep
0/ 1/ 1
Encode
0 = No
1 = Yes
23
(0x17)
Delay Option
0/ 3/ 0
Encode
0 = None, 1 = Shutter
2 = Control, 3 = Both
Table 10-9 Material parameters (continued)
QM UM
Cmd ID
Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type
Notes
Update Restrictions
and Display Notes
- TGF10 Tracer Gas Filler (36 pages)
- Sensistor ILS500 F Leak Detection Filler (90 pages)
- T-Guard Leak Detection Sensor (85 pages)
- T-Guard Leak Detection Sensor Interface description (40 pages)
- Sensistor ISH2000P Hydrogen Leak Detector, Panel Model (51 pages)
- Sensistor ISH2000 HySpeed Hydrogen Leak Detector (54 pages)
- LDS3000 Modular Leak Detector (52 pages)
- LDS3000 Modular Leak Detector Interface description (56 pages)
- BM1000 Bus module (14 pages)
- I/O1000 I/O module (18 pages)
- CU1000 Control unit (24 pages)
- Helium Leak Detector Modul1000 (130 pages)
- Helium Leak Detector Modul1000 Interface description (40 pages)
- UL5000 Dry Helium Leak Detector (108 pages)
- UL5000 Dry Helium Leak Detector Interface description (14 pages)
- UL1000 Fab Dry Helium Leak Detector (119 pages)
- HLD6000 Refrigerant Leak Detector (76 pages)
- HLD6000 Refrigerant Leak Detector Interface Description (40 pages)
- IO1000 I/O module (18 pages)
- Ecotec E3000 Multigas-Sniffer-Leak Detector (92 pages)
- Ecotec E3000 Multigas-Sniffer-Leak Detector Interface description (36 pages)
- Sensistor XRS9012 Hydrogen Leak Detector User Manual (28 pages)
- Sensistor XRS9012 Hydrogen Leak Detector Maintenance manual (14 pages)
- Extrima Ex-certified Hydrogen Leak Detector (62 pages)
- Sensistor ILS500 Leak Detection System (107 pages)
- Sensistor ISH2000 Hydrogen Leak Detector (58 pages)
- Sensistor ISH2000 Hydrogen Leak Detector (108 pages)
- Sensistor Sentrac Hydrogen Leak Detector (86 pages)
- Protec P3000(XL) Helium Leak Detector (132 pages)
- Pilot Plus Vacuum Gauge (2 pages)
- CO Check Carbon Monoxide Meter (2 pages)
- GAS-Mate Combustible Gas Leak Detector (12 pages)
- Whisper Ultrasonic Leak Detector (8 pages)
- Vortex AC Refrigerant Recovery Machine 115V (20 pages)
- Vortex AC Refrigerant Recovery Machine 230V (16 pages)
- Wey-TEK Refrigerant Charging Scale & Optional Charging Module (2 pages)
- Wey-TEK Refrigerant Charging Scale & Optional Charging Module (44 pages)
- D-TEK CO2 Refrigerant Leak Detector (12 pages)
- TEK-Mate Refrigerant Leak Detector (12 pages)
- Compass Refrigerant Leak Detector (12 pages)
- D-TEK Select Refrigerant Leak Detector (12 pages)
- Explorer Portable Gas Chromatograph (369 pages)
- MicroFID II Portable Flame Ionization Detector (89 pages)
- DataFID Portable Flame Ionization Detector for Landfill Emissions Monitoring (91 pages)
- Hydrostik Hydrogen Fuel Cylinder Installation (7 pages)