4 then action definitions, Section – INFICON IC6 Thin Film Deposition Controller User Manual

Page 164

9 - 16

IC6 Operating Manual

9.4 THEN Action Definitions

NOTE: The following are level outputs that once turned on will remain active until

turned off. This is true even if the Logic string is cleared.

START INHBT (ON/OFF)

XTL FL INHB (ON/OFF)

RWS INHIBIT (ON/OFF)

RWS INITIATE (ON/OFF)

SOAK 1 HOLD (ON/OFF) ##

SOAK 2 HOLD (ON/OFF) ##

EXTERN OUT (ON/OFF) ##

MESSAGE (ON/OFF) ##

CLOCK HOLD (ON/OFF)

PRE COND S/H (ON/OFF)

CANCEL TIMER ## . . . . . . . . . . . . . 1 to 20

Deactivates the designated timer ## and resets it to zero.

CLEAR COUNTER ## . . . . . . . . . . . 1 to 20

Clears the designated counter ##.

CLOCK HOLD . . . . . . . . . . . . . . . . . ON/OFF

This feature holds the state timer during any non-rate control state. These
states include the pre-deposit states — Ready, Crucible Switch, PreCond Rise,
PreCond Soak, Rise 1, Soak 1, Rise 2, Soak 2 — and the post-deposit state
Idle Ramp.

For the feature to be activated the state’s timer must be non-zero. If the IC6 is
in the Ready state and a Start command is executed while CLOCK HOLD is
active, the IC6 will progress to the first pre-deposit state with a non-zero state
time. If the IC6 is in the Crucible Switch state, waiting for Turret Feedback Input,
and CLOCK HOLD is activated, when the turret positioned input is activated,
the IC6 will progress to the next pre-deposit state having a non-zero state time.
The IC6 is prevented from continuing state processing until the CLOCK HOLD
action is turned OFF.

CONTINUE DEP ## . . . . . . . . . . . . . 0 (any material) to 32

Maintains the designated Material ## in the Deposit state but does not zero the
thickness. This action cannot be done from a Ready, Idle, Stop, Suspend
Crystal Switching, or Crucible Switch state. If the crystal is failed, this action will
put the associated source into the Time Power state if the previous state was
Non-Deposit Hold, otherwise it is not allowed.

EXTERN OUT (ON/OFF) ## . . . . . . 1 to 38

Designates a hardware output ## and places it into its ON or OFF state.
Outputs can be given names up to 15 characters long. Outputs are named in
the I/O Map display.