INFICON IC6 Thin Film Deposition Controller - Manual (Page 218)

10 - 48
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
13
(0x0d)
Start Timer Timer Range is 1-20
14
(0x0e)
Cancel Timer Timer Range is 0-20
0 = All
15
(0x0f)
Clock Hold On Stops timer in Pre-Deposit or Post-Deposit. Keeps in current
state at current power setting.
Material Range 0-32 (0 = all materials)
16 (0x10) Clock Hold Off Restarts timer in Pre-Deposit or Post-Deposit
Material Range 0-32 (0 = all materials)
17
(0x11)
User message on Message Range is 1-10
18
(0x12)
User message off Message Range is 1-10
19
(0x13)
Soak Hold 1 on Material Range is 0-32
(0 = all materials)
20
(0x14)
Soak Hold 1 off Material Range is 0-32
(0 = all materials)
21
(0x15)
Soak Hold 2 on Material Range is 0-32
(0 = all materials)
22
(0x16)
Soak Hold 2 off Material Range is 0-32
(0 = all materials)
23
(0x17)
Switch
Sensor to
Sensor Range = 1 - 8
Crystal Range = 0 to maximum allowed crystals for the
requested sensor. If Crystal # = 0, will switch to the "next"
crystal. If the sensor is not used in a layer currently running, the
next crystal will be the next one in the sequence. If the sensor
is used in a layer that is running, the next crystal will be the next
one from the XL Position parameters sequence. If a sensor is
used in a layer that is running, the value of "Crystal #" must be
zero, otherwise, an error will occur.
24
(0x18)
Clear Failed Crystals
X
Clears all failed crystals except the current crystal for the
requested sensor. X = Sensor
25
(0x19)
Reserved for future use.
26
(0x1a)
Rotate head X If the requested sensor is a multi crystal sensor and the IC6 is
in Ready, Stop or all active layers are in Idle or Suspend, the
sensor head will rotate. X = Sensor
27
(0x1b)
Default all
Parameters
Sets all parameters except the communication parameters to
default values.
Table 10-15 Remote general (continued)
RG
Command
ID
Meaning
Action Value Notes