beautypg.com

9 update sensor parameter, 10 query source parameter, 11 update source parameter – INFICON IC6 Thin Film Deposition Controller User Manual

Page 224: 12 query process layer parameter

background image

10 - 54

PN

07

4-

50

5-

P1

F

IC6 Operating Manual

10.4.35.9 Update Sensor Parameter

Sensor Type (2), Sensor 1, CrystalTwo (1)

Command Format: US

US2 1 1

Command US2 1: 08005553020101000000AC

Response: 0300002F0635

10.4.35.10 Query Source Parameter

Shutter Output (2), Source 1

Command Format: QC

QC2 1

Command QC2 1: 04005143020197

Response: 0700003F060000000045

10.4.35.11 Update Source Parameter

Number of crucibles (3), Source 1, 4 crucibles (1)

Command Format: UC

UC3 1 1

Command UC3 1 1: 080055430301010000009D

Response: 03000054065A

10.4.35.12 Query Process Layer Parameter

Process 1, Layer 1

Command Format: QP

QP1 1 1

Command QP1 1 1: 05005150010101A4

Response: 0700002A060300000033