INFICON IC6 Thin Film Deposition Controller - Manual (Page 291)

15 - 21
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
3. Crystal does not oscillate or
oscillates intermittently (both in
vacuum and in air) a. Intermittent or poor electrical
contact (contacts oxidized) a. Use an ohm meter or DVM to
check electrical continuity, clean
contacts
b. Leaf springs have lost
retentivity (ceramic retainer,
center insulator) b. Bend leaves to approx. 45°
c. RF interference from
sputtering power supply c. Verify earth ground, use
ground strap adequate for RF
ground, change location of IC6
and oscillator cabling away from
RF power lines, connect IC6 to a
different power line
d. Cables/oscillator not
connected, or connected to
wrong sensor input d. Verify proper connections,
and inputs relative to
programmed sensor parameter
4. Crystal oscillates in vacuum
but stops oscillation after open
to air a. Crystal was near the end of its
life; opening to air causes film
oxidation which increases film
stress a. Replace crystal
b. Excessive moisture
accumulates on the crystal b. Turn off cooling water to
sensor prior to venting, flow
warm water through sensor
while chamber is open
Table 15-8 Troubleshooting Transducers/Sensors (continued)
SYMPTOM CAUSE REMEDY