INFICON IC6 Thin Film Deposition Controller - Manual (Page 285)

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IC6 Operating Manual
Co-Dep Crosstalk Error An attempt is being made to turn on a sensor
that will cause a Crosstalk error. Each input error
message is
taken down by
pressing the
clear key. Material
DAC Used Material ##
Or
DAC Used Sensor ## The DAC number has been previously defined
as a recorder output in the material or the sensor
set up. Source
parameter
DAC Used Source XX The DAC number has been previously defined
as a source DAC output in one of the source set
ups Material, Sensor
and Source
parameter
Input in use An attempt was made to enter an input that is
already reserved for use in source setup or one
of the logic statements. Source
parameter
Output in use An attempt was made to enter an output that is
already reserved for use. The output is already
reserved for use in Sensor or Source set up or in
one of the logic statements. Sensor, Source
parameter and
Logic Edit
Invalid Lock Code An incorrect lock code was used to attempt to
unlock the IC6. Menu
Can’t Empty Active Process Can’t empty a process if it is set as the active
process. Process Layer
detail
Can’t Delete Co-Dep An attempt was made to delete a layer set for
co-deposition. Process Layer
detail
Can’t Insert Co-Dep A layer cannot be inserted between two layers
set for co-deposition. Process Layer
detail
Output Used In Logic Equ # An attempt was made to use an Output that is
programmed in Logic Statement #. Source Sensor
General
Reset Required First An attempt was made to enable Source
Maintenance while not in Ready. Source
Maintenance
Table 15-6 Input error messages (continued)
Input Error Message Set Cleared Screen