INFICON IC6 Thin Film Deposition Controller - Manual (Page 212)

10 - 42
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
17
(0x11)
System Configuration
(What boards are
present.)
2 Bit
0x0001 = Measurement Bd 1 0x0002 = Measurement Bd 2
0x0004 = Measurement Bd 3, 0x0008 = Measurement Bd 4, 0x0010 = I/O Board 1,
0x0020 = I/O Board 2, 0x0040 = I/O Board 3, 0x0080 = Optional DAC Board,
0x0100 = Temperature Control Board 1, 0x0200 = Temperature Control Board 2,
0x0400 = Ethernet Board, 0x0800 = {Reserved}, 0x1000 = {Reserved},
0x2000 = {Reserved}, 0x4000 = {Reserved}, 0x8000 = {Reserved}
18
(0x12)
Number of Layers in
Process
Process Number
1-50
4
Table 10-12 Status general commands (continued)
SG
Comm
and ID Description Option
Number of
bytes in
the
response
Data Returned Notes