INFICON IC6 Thin Film Deposition Controller - Manual (Page 182)

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IC6 Operating Manual
10.4.2 Status Commands
Status commands return pertinent information based on a specific request made.
Commands are provided to determine global information which is system level,
layer or sensor information. A status code is required for each command. See
Status General on page 10-40 to Status Sensor on page 10-45 .
The command variations include:
Remote commands perform an action based on the specific command given.
Commands are provided to affect global features which are system level oriented
(RG commands, see
Remote General Action on page 10-47 ) or layer oriented (RL
commands see Remote Layer Action on page 10-50 ). Every command requires a
remote code and may require a value.
Command variations include:
RG = Affects system or IC6 level conditions.
RL = Affects conditions for a specified layer.
10.4.3 HELLO Command
H given in hex format
Hex form example for H1 including length and checksum: 0200480149,
Response:
10.4.4 Query Source Parameter
Command = QC
Command ID = See Table 10-5
Source Number = Source number 1 - 6
Response = | See Data Type column in Table 10-5.
Table 10-3 Status commands
Status command Parameter
SG General System Level
SL Layer Information
SS Sensor Information
Table 10-4 Hello command response
Command ID Meaning Response
(0x01) ASCII name and version = IC6 Version x.xx
(0x02) Version numbers
Structure Version
Compatibility Version,
Range Version
(0x03) Firmware version number