On-zero – INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
If the TOOLING is changed, the new TOOLING value is used for
subsequent calculation of the individual as well as aggregate rate and
thickness. Also, the aggregate thickness and each sensor’s thickness
accumulated thus far will be re-scaled based on the change to the
TOOLING.
When Multipoint has been set to Yes for multiple sensor applications,
the sensor tooling factors should first be adjusted so all sensors read
the same rate. Next, adjust this TOOLING to get agreement between
the thickness measured by the IC6 and the thickness measured at the
substrates.
CAL THICKNESS . . . . . . . 0 to 999.8, 999.9 = UNCAL
Calibration Thickness values are only used in co-deposition
applications and do not pertain to single layer sequential deposition.
These thickness values are used to compensate for the cross talk (or
interference) from each source onto sensors used to control the other
source’s flux. The values range from 0.000 to 999.8 kÅ or UNCAL. The
default entry of 999.9 is interpreted as UNCAL. UNCAL indicates the
sensor has not been calibrated. Values may be entered by the user or
may be entered automatically using the cross talk calibration feature of
the IC6. See
for a discussion of cross talk
calibration.
QUALITY PERCENT . . . . . 0 to 99% and > 0.5 Å/s
Quality Percent selects the permissible rate deviation in percent of the
measured rate relative to the desired rate. The default value is 0%
which disables the function.
QUALITY COUNTS . . . . . . 0 to 99
This sets the number of measurements that must be outside the
allowed Quality Percent before the crystal is declared failed. If the rate
deviation relative to the 2.5 second average rate is greater than the
programmed Quality Percent limit, the Counts value is incremented. If
the rate deviation is less than the programmed Quality Percent, the
Counts value is decremented. Counts are not allowed to have negative
values. If Counts exceeds the value programmed, the IC6 will
automatically crystal switch, complete the process on TIME-POWER,
POST DEP, SUSPEND or STOP the process. The rate deviation is
computed on each individual rate measurement during the deposit
phase, that is, every 100 ms. Upon entering Deposit, the Quality Count
is delayed by five seconds. The Q Count on the Sensor Information
screen will show DLY (delay) when in pre-deposit, and during the delay
period at the beginning of Deposit.
The default value is 0, which disables the function.