INFICON IC6 Thin Film Deposition Controller - Manual (Page 132)

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IC6 Operating Manual
To insert, first move the cursor to the layer in which to place the tagged layers. This
can be in the current process or any other process. Then, press F2 Insert Layer
and the tagged layers will be inserted into the process. The insert will be done the
number of times (#) entered into the # Times To Be Copy parameter. Layers that
exist will be moved to make room for the new layer(s) as necessary. If the cursor
is on the last layer, then the new layer(s) will be added. If there are not enough
empty layers to insert the tagged layers the number of times to be copied, the insert
will fail, no layers will move and an error message Not Enough Layers will be
displayed. Layers may be copied to other processes.
F3 Delete Layer will remove the tagged layer(s) from the process. Any layers in the
process after those deleted will be shifted to fill in where the deleted layers were. If
a delete removes all layers from the active process, the process will fail. If the
updated process has fewer layers than the Layer to start parameter's value, the
Layer to start parameter's value will default to 1.
While the layers are tagged, pressing F4 UnTag Layer will remove the tag markers
and redisplay the layer(s) in standard font color. Returning to the Main Menu will
also remove the tag marker(s). When a tag is removed the # Times To Be Copy
parameter will reset to a value of one, and the parameter will no longer be visible.
Tags can only be set within a single process. Tags are not allowed between
processes.
6.4.1.2 Layer Parameters
MATERIAL # . . . . . . . . . . . . . . . . . . 0 to 32
Specify which Material to use for this layer. If the Material has not yet been
defined, its default parameters will be used. Entering 0 deletes the layer. This
value cannot be changed on the active process while it is running.
FINAL THICK(ness) . . . . . . . . . . . . 0 to 999.99 kÅ
This is the thickness setting that triggers the end of the DEPOSIT state. A value
of 0.000 kÅ will trigger Final Thickness immediately on entering Deposit and
continue according to the On Final Thickness parameter setting,
see page
5-17 . The Source Shutter and Sensor Shutter relays return to their normal
states and the Layer enters the Idle Ramp or the Feed Ramp state. The default
value is 0.000 kÅ.
THICK(NESS) LIMIT . . . . . . . . . . . . 0.0 to 999.99 kÅ
This sets the thickness at which the Thickness Limit logic state is set True. This
thickness begins to accumulate after entering the Deposit state. The state
remains active after reaching Thickness Limit until the beginning of the IDLE
state. The default value is 0.000 kЕ.