INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
BACKUP SENSOR . . . . . . 0 to 8
Select the sensor to use if the primary sensor fails. This parameter only
appears if Multipoint has been set to No. Default is 0, which disables the
function. This parameter cannot be changed when a material is running.
BACKUP TOOLING. . . . . . 1.0 to 999.9%
Sets the Tooling factor for the backup sensor if one has been selected.
Visible only if Multipoint is set to No. Default value is 100%.
When Multipoint is set to Yes (1)
AGGREGATE MULTIPLY . No (0), Yes (1)
Default setting is No. For multiple sensor deposition control applications
the parameter AGGREGATE MULTIPLY (Yes/No) determines whether
a multiplier is calculated for a crystal’s rate information if a crystal fail
occurs during deposition. This multiplier is used only during the layer in
which the crystal failure occurs. After this layer is finished, the multiplier
is cleared. Use of AGGREGATE MULTIPLY affects calculation of the
aggregate rate as shown in
. (Assume all Sensor Weights are
the same.)
Table 5-1 Aggregate multiplier effect
Condition of the deposition
Sensor
#1
Rate (Å)
Sensor
#2
Rate (Å)
Sensor
#3
Rate (Å)
Sensor
#4
Rate (Å)
Aggregate
Rate (Å)
Aggregate
Multiplier
Beginning
10
10
10
10
10
1
Later in the Deposition
16
10
10
4
10
1
If #1 fails, notice what happens
to the aggregate rate if the
aggregate multiplier is not
calculated.
Xtal Fail
10
10
4
8
1
An AGGREGATE MULTIPLIER
is calculated as the ratio of the
aggregate rate before the
sensor failure (using an average
rate for the failed sensor prior to
failure) divided by the aggregate
rate after the sensor failure
(without the failed sensor’s rate
information).
With: 10
Without: 8
Ratio 1.25