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6 input error messages, Section 15.6 – INFICON IC6 Thin Film Deposition Controller User Manual

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IC6 Operating Manual

15.6 Input Error Messages

Keyboard Input Error Messages come up on the entry of invalid parameters. These
messages will appear on the transient error message line in the message box. The
font color of the parameter value being updated will change to a different color to
denote an input error has been made. They will clear when the clear key is pressed.
The original stored value will then be re-displayed. See

Table 15-6

.

Table 15-6 Input error messages

Input Error Message

Set

Cleared

Screen

Value Too High

The value entered is larger than the maximum
value allowed.

Each input error
message is
taken down by
pressing the
clear key.

Any Parameter
edit

Value Too Low

The value entered is lower than the minimum
value allowed.

Any Parameter
edit

Duplicate Source

Can use each source number only once for
thickness sum.

General

Duplicate Sensor

The single or one of the multipoint sensors for
the material cannot also be set as the backup
sensor.

Material

Empty Process

Can’t select an empty process as process to run.

General

Invalid Mask

An attempt was made to enter an incorrect
Ethernet net mask.

General

Incorrect Time

An attempt was made to enter more then 59
seconds or 99 minutes into a time parameter.

Material

Must use one sensor

In multi-point mode, at least one sensor for each
defined material must have its option parameter
non-zero.

Material

Ramp 1 > Ramp 2

Invalid material parameter ‘Ramp’, values were
entered. Start Ramp 1 thickness value must be
less then Start Ramp 2 value when the Start
Ramp 2 value is non-zero.

Material

Ramp 2 < Ramp 1

Invalid material parameter ‘Ramp’, values were
entered. Start Ramp 2 thickness value must be
greater then Start Ramp 1 value.

Material

Sensor in use

An attempt is being made to turn on a sensor
that is already in use for the other material of a
co-deposited material.

Material

Bad Crystal and Running

An attempt is being made to turn on a sensor
that is bad and the Material is running.

Material

Co-Dep Uncalibrated

An attempt is being made to turn on a sensor
that is not calibrated for Co-Dep.

Material