INFICON IC6 Thin Film Deposition Controller - Manual (Page 332)

A - 8
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
234 WB
2
10.770 *1.000 tungsten boride
235 WC 15.600 0.151 tungsten carbide
236 WO
3
7.160 *1.000 tungsten trioxide
237 WS
2
7.500 *1.000 tungsten disulfide
238 WSi
2
9.400 *1.000 tungsten silicide
239 Y 4.340 0.835 yttrium
240 Y
2
0
3
5.010 *1.000 yttrium oxide
241 Yb 6.980 1.130 ytterbium
242 Yb
2
O
3
9.170 *1.000 ytterbium oxide
243 Zn 7.040 0.514 zinc
244 Zn
3
Sb
2
6.300 *1.000 zinc antimonide
245 ZnF
2
4.950 *1.000 zinc fluoride
246 ZnO 5.610 0.556 zinc oxide
247 ZnS 4.090 0.775 zinc sulfide
248 ZnSe 5.260 0.722 zinc selenide
249 ZnTe 6.340 0.770 zinc telluride
250 Zr 6.490 0.600 zirconium
251 ZrB
2
6.080 *1.000 zirconium boride
252 ZrC 6.730 0.264 zirconium carbide
253 ZrN 7.090 *1.000 zirconium nitride
254 ZrO
2
5.600 *1.000 zirconium oxide
Table A-1 Material table (continued)
Code Formula Density Z-Ratio Material Name