INFICON IC6 Thin Film Deposition Controller - Manual (Page 208)

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IC6 Operating Manual
Table 10-11 Sensor parameters
QS US
Cmd ID
Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type Notes
Update Restrictions
and Display Notes
1
(0x01)
(Sensor) Shutter
Out(put)
0/ 38/ 0 Integer 0 = not defined
Update not allowed if the sensor is running. Not accepted
if output in use by other hardware
2
(0x02)
Sensor Type 0/ 4/ 0 Encode 0 = Single 1 = XtalTwo
2 = XtalSix 3 = Xtal12
4 = Generic
Update not allowed if the
sensor is running.
3
(0x03)
(Sensor) Switch
Out(put)
0/ 38/ 0 Integer 0 = not defined
Gray font if Sensor Type =
Single
Update not allowed if the
sensor is running. Not
accepted if output in use
by other hardware.
4
(0x04)
Auto-Z 0/ 1/ 0 Encode 0 = No, 1 = Yes
5
(0x05)
# of Positions 1/ 12/ 1 Integer
Visible only when Sensor
Type = 4
Update not allowed if the
sensor is running.
6
(0x06)
# of Pulses 1/ 10/ 1 Integer
7
(0x07)
Pulse On (Time)
(Seconds)
0.1/ 9.9 /1 REAL_3X1
8
(0x08)
Pulse Off (Time)
(Seconds)
0.1/ 9.9 /1 REAL_3X1
9
(0x09)
Recorder Output 0/ 12/ 0 Integer 0 = not defined Not allowed to be the
same as a source DAC
10
(0x0a)
Recorder Function 0/ 2/ 0 Encode 0 = Rate 1 = Thick
2 = RateDev
Note: Rate Filter Time has
no effect
11
(0x0b)
Recorder Range 0/
99999/
100
Integer Gray font when Recorder
Function = Rate Deviation