INFICON IC6 Thin Film Deposition Controller - Manual (Page 81)

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IC6 Operating Manual
3.4.2 Executing a Process
Once a process has been defined, it is ready to execute.
The IC6 will not allow certain parameters to be changed while executing a process.
 A Process is not being executed when the IC6 is in the READY state, or when
the Last Layer is in the IDLE state (end of process). A Layer is not being
executed when the IC6 is the READY, STOP, SUSPEND or IDLE state.
 STOP freezes a process, the status information on the display is maintained
and all control voltage outputs are set to zero if multiple layers are active.
 SUSPEND is similar to a STOP but only acts on one layer.
 START, pressed once, will continue the process from the point at which it was
stopped. If STOP occurred during a Rate Ramp and the layer is continued
without a RESET, the setpoint rate on entering Deposit will be replaced with the
rate in effect when the STOP occurred. It may be desireable to adjust the SOAK
POWER 2 level based on data log history prior to continuing the stopped layer.
Subsequent STARTs will start the next sequential layer dependent upon the
value set for the General parameter Max Concurrent Layer.
 RESET takes a stopped process back to the beginning of the process at the
designated “Layer to START.”
HINT: It may be desirable to execute a new process in TEST before doing an
actual deposition to check correct shutter operation, sequencing and limits.
The execution of a process is depicted in the following state diagram.