4 communication commands, 1 query and update commands – INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
10.4 Communication Commands
The following only include the command portion of the command packet and the
response portion of the response packet. The headers/trailers are assumed. (See
section 10.3.1, Protocol, on page 10-6
for their definition.)
General definitions
10.4.1 Query and Update Commands
Query commands are used to request established parameter values. There is a
specific query command for each parameter group. Depending on the actual
hardware configuration, the response to some Query commands may be an E error
code indicating there is no data available. Each command has one to three
arguments.
Update commands are used to change a specified parameter to a new value or
condition. Some parameters are order dependent in that they cannot be updated
prior to certain other parameters. There is a specific update command for each
parameter group.
The command variations include:
Table 10-2 QUERY and UPDATE commands
QUERY command
Parameter
UPDATE Command
QC
Source Parameters
UC
QG
General Parameters
UG
QI
Input Name
UI
QK
Process Name
UK
QL
Logic Statements
UL
QM
Material Parameters
UM
QN
Material Name
UN
QO
Output Name
UO
QP
Process Layer Parameters
UP
QS
Process Sensor Parameters
US
QT
Output Type
UT
QV
User Message
UV