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4 communication commands, 1 query and update commands – INFICON IC6 Thin Film Deposition Controller User Manual

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IC6 Operating Manual

10.4 Communication Commands

The following only include the command portion of the command packet and the
response portion of the response packet. The headers/trailers are assumed. (See

section 10.3.1, Protocol, on page 10-6

for their definition.)

General definitions

= 4 byte, single precision ANSII standard floating point, low end first

= 4 byte, signed integer, low end first

= variable length, null terminated ASCII characters.

10.4.1 Query and Update Commands

Query commands are used to request established parameter values. There is a
specific query command for each parameter group. Depending on the actual
hardware configuration, the response to some Query commands may be an E error
code indicating there is no data available. Each command has one to three
arguments.

Update commands are used to change a specified parameter to a new value or
condition. Some parameters are order dependent in that they cannot be updated
prior to certain other parameters. There is a specific update command for each
parameter group.

The command variations include:

Table 10-2 QUERY and UPDATE commands

QUERY command

Parameter

UPDATE Command

QC

Source Parameters

UC

QG

General Parameters

UG

QI

Input Name

UI

QK

Process Name

UK

QL

Logic Statements

UL

QM

Material Parameters

UM

QN

Material Name

UN

QO

Output Name

UO

QP

Process Layer Parameters

UP

QS

Process Sensor Parameters

US

QT

Output Type

UT

QV

User Message

UV