INFICON IC6 Thin Film Deposition Controller - Manual (Page 192)

10 - 22
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
Soak 1 0X4B 0xB5
Rise 2 0x4C 0xB4
Soak 2 0x4D 0xB3
Shutter Delay 0x4E 0xB2
Deposit 0x4F 0xB1
Rate Ramp 1 0x50 0xB0
Rate Ramp 2 0x51 0xAF
Manual 0x52 0xAE
Time Power 0x53 0xAD
Non-Dep Control 0x54 0xAC
Non-Dep Hold 0x55 0xAB
Feed Ramp 0x56 0xAA
Feed 0x57 0xA9
Idle Ramp 0x58 0xA8
Idle 0x59 0xA7
Suspend 0x5A 0xA6
Stop 0x5B 0xA5
Final Thick 0x5C 0xA4
Thick Limit 0x5D 0xA3
Thick Sum XXX
See Note 4
Equation # 1 3 Thickness
xxx.xxx
0 999.9 0x5E 0xA2
Time Limit 0x5F 0xA1
Process XXX Process # 1 50 0x60 0xA0
Layer XXX Layer # 1 200 0x61 0x9F
Material XXX Material # 1 32 0x62 0x9E
Sensor XXX Sensor # 1 8 0x63 0x9D
Source XXX Source # 1 6 0x64 0x9C
Layer End XXX Layer #
0 = Any
0 200 0x65 0x9B
Material End XXX Material #
0 = Any
0 32 0x66 0x9A
Table 10-7 Event list (continued)
Events 1st
numeric
(1 Byte)
(XXX)
Min Max 2nd
numeric
(Integer)
(YYY)
Min Max Logic
Code
Logic
Code
Negated