INFICON IC6 Thin Film Deposition Controller - Manual (Page 207)

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IC6 Operating Manual
10.4.24 Query Sensor Parameter
Command = QS
Command ID = See Table 10-11 .
Sensor Number = Sensor number 1 - 8
Response = |
Type of response depends on command ID, see Data Type column in Table 10-11 .
10.4.25 Update Sensor Parameter
Command: = US
Command ID = See Table 10-11
Sensor Number = Sensor number 1 - 8
Parameter Value = | Type of value depends on command ID,
see Data Type column in
Table 10-11 .
Response = None (Just header and trailer)
4
(0x04)
(Crucible)
Cruc
1/ 64/ 1 Integer Update not allowed if active
process is running
5
(0x05)
(Co-Deposition)
CoDep
0/ 1/ 0 Encode 0 = No 1 = Yes
When this layer is set to yes
the next layer will not
display.Gray font if next layer
is empty OR next layer is set
to Yes OR this layer is the last
layer.
Update not allowed if active
process is running No update
if the last programmed layer
OR if the next layer's Co-Dep
parameter is set to Yes
6
(0x06)
(Ratio Control)
Ratio Cntrl
(%)
0/
999.9/
0
REAL_4X1 Gray Font when
Co-deposition is No
Table 10-10 Process layer parameters (continued)
QP UP
Cmd ID
Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type Notes
Update Restrictions
and Display Notes