INFICON IC6 Thin Film Deposition Controller - Manual (Page 203)

10 - 33
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
98
(0x62)
Sensor 1 Xtal Position
First
0/
12/
0
Integer
Visible only if Multipoint is
set to Yes
Gray font if Sensor Type is
Single, CrystalTwo, or
Generic
99
(0x63)
Sensor 2 Xtal Position
First
100
(0x64)
Sensor 3 Xtal Position
First
101
(0x65)
Sensor 4 Xtal Position
First
102
(0x66)
Sensor 5 Xtal Position
First
103
(0x67)
Sensor 6 Xtal Position
First
104
(0x68)
Sensor 7 Xtal Position
First
105
(0x69)
Sensor 8 Xtal Position
First
106
(0x6a)
Sensor 1 Xtal Position
Last
0/
12/
0
Integer
Visible only if Multipoint is
set to Yes
Gray font if Sensor Type is
Single, CrystalTwo, or
Generic
107
(0x6b)
Sensor 2 Xtal Position
Last
108
(0x6c)
Sensor 3 Xtal Position
Last
109
(0x6d)
Sensor 4 Xtal Position
Last
110
(0x6e)
Sensor 5 Xtal Position
Last
111
(0x6f)
Sensor 6 Xtal Position
Last
112
(0x70)
Sensor 7 Xtal Position
Last
113
(0x71)
Sensor 8 Xtal Position
Last
114
(0x72)
Sensor 1/ 8/ 1 Integer Visible only if Multipoint is
set to No. Update not
allowed if material is
running.
Table 10-9 Material parameters (continued)
QM UM
Cmd ID Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type Notes
Update Restrictions
and Display Notes