INFICON IC6 Thin Film Deposition Controller - Manual (Page 66)

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IC6 Operating Manual
3.3.3.3.1 Function Key Selection Choices for the Sensor Information Rate/Xtal Display
To enable the function keys, move the cursor key to a Sensor number.
F1 Switch Crystal
To initiate a crystal switch for the sensor number selected, press F1. The crystal
switch will be done on the sensor indicated by the box cursor. Use the cursor
arrow keys to position the box cursor.
F2 Rotate Sensor
If the sensor number chosen is a XtalSix, Xtal12 or Generic sensor type, press
F2 to sequentially rotate the sensor head through all positions. This is useful to
initialize a multi-position sensor after replacing failed crystals. The action is
taken on the sensor indicated by the box cursor if the IC6 is in Ready, Stop or
all active layers are in Idle or Suspend. Failed crystal numbers are shown in the
Failed column under Crystal.
Generic Sensor Status showing which crystals are good and which are failed
relative to the current position is displayed in the bottom region of the table.
This information is not retained upon leaving the Sensor Information display. To
re-gain this information, press F2 again.
F3 Clear S & Q Counts
Press F3 to clear the Quality and Stability counters for the sensor chosen by
the box cursor.
F4 Clear Failed Crystals
Pressing F4 resets the status of the sensor that the box cursor is on for failed
sensors and crystal positions.