Caution – INFICON IC6 Thin Film Deposition Controller User Manual

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IC6 Operating Manual

CAUTION

The Sensor must be positioned so the rate can be
monitored with the source shutter closed when going to
the non-deposit control state.

Figure 5-6 Source power level profile

DELAY OPTION. . . . . . . . . . . . . . . . None (0), Shutter (1), Control (2), Both (3).

The default value is None (0).

Shutter (1): The source shutter relay remains in its normal state and the crystal
shutter relay is active. The transfer sensor, which must be positioned to sample
the source flux with the source shutter closed, provides closed loop rate control.
The rate control must be within the specified Shutter Delay Accuracy or 0.5 Å/s
of the desired deposition rate for 5 seconds before the IC6 will enter the
DEPOSIT state, opening the source shutter and thus exposing the substrate to
a well controlled rate of evaporant flux. If the required rate control accuracy
cannot be achieved within 60 seconds, the process will STOP.

Control (2): Control delay suspends DEPOSIT control loop action on the
source control power for the time interval programmed in Control Delay Time.
During Control Delay, the source and sensor shutters are activated.

Both (3): IC6 will first enter a shutter delay state followed by the control delay
interval.

CONTROL DELAY TIME . . . . . . . . . 00:00 to 99:59

This is the time interval for the IC6 to be held in the Control Delay state. The
parameter is displayed only if the Delay Option chosen is Control or Both. The
default value is 00:00.