INFICON IC6 Thin Film Deposition Controller User Manual
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IC6 Operating Manual
Sensor (Number field)
These numbers correspond to the sensor connector channel numbers on the
rear panel of the IC6. Use the cursor keys to position the box cursor over the
desired sensor number. When either Switch Crystal, Rotate Sensor, Clear S &
Q Counts, or Clear Failed Crystals is pressed, that function will be performed
on the sensor indicated by the box cursor if the IC6 is in Ready, Stop or all
active layers are in Idle or Suspend. Text will only be shown for installed cards,
unless you are in TEST.
Average Rate
This average is calculated based on a 1 second average of the Filtered Rate.
Raw Rate
Shows the instantaneous rate measurement. The rate fields are useful in
identifying if a sensor’s rate measurements are becoming erratic.
% Life
The IC6 allows a 1.5 MHz frequency shift on the monitor crystal corresponding
to 100% crystal life. The value shown represents the amount of crystal life
consumed. The amount of useful crystal life is highly dependent on the nature
of the material being deposited as well as deposition conditions.
Crystal
This field is subdivided into three categories; current position (Curr), next
position (Next), and Failed. Information is displayed in these fields only if the
sensor has more than one position.
Curr: For a XtalTwo sensor, the Curr field will show either 1 or 2. 1 indicates the
active crystal of the dual sensor head. 2 indicates the inactive (shuttered)
crystal of the dual sensor head. For a multi-position sensor, the Curr field
indicates the current position of the sensor head.
Next: The Next field indicates the position to which the sensor head will rotate
upon pressing the CrystalSwitch function key.
Failed: The Failed field indicates the sensor head positions containing failed
crystals.
Q Count (Crystal Quality value field)
This field displays the value currently accumulated in the Crystal Quality
counter when active. Delay indicates the Crystal Quality counter is not active.
The Crystal Quality counter will become active five seconds after entering
DEPOSIT and if the Crystal Quality parameter is non-zero,
S SIngle (Crystal Stability value field)
This field displays the positive single frequency shift currently in the Crystal
Stability counter,
.