INFICON IC6 Thin Film Deposition Controller - Manual (Page 213)

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IC6 Operating Manual
10.4.31 Status Layer
Command = SL
Command ID = See Description in Table 10-13 .
Layer = Layer number (0 – 200 or 255 (0xFF))
 Layer = 0 will return the status of six layers. The response will include all active
layers. If there is less then six active layers the data for the inactive layers will
be filled with zeros.
 Layer = 255 (0xFF) will return the status for the active layer, if there is only one.
If more than one layer is active, an error will be returned.
 Layer = 1-200 will return the status for the requested active layer. If the
requested layer is inactive, an error will be returned.
Response = See Data Returned in Table 10-13 .
Table 10-13 Status layer
SL
Command
ID
Description
Number of
bytes in
the
response
Data Returned Notes
0
(0x00)
N/A
1
(0x01)
Filtered Rate 4 or 24 Å/S
2
(0x02)
Displayed Rate 4 or 24 Å/S Averaged over one second
3
(0x03)
Source Power Output 4 or 24 %
4
(0x04)
Thickness 4 or 24 KÅ
5
(0x05)
State 1 or 6 See encodes in section 3.5 on page
3-32
6
(0x06)
State Time 4 or 24 Seconds in the current state
7
(0x07)
Active Sensors 1 or 6 Active Sensors Byte is an eight-bit word
where each bit represents a sensor
Any bit set indicates a sensor is active for the requested layer.
Bit 0 = Sensor 1, bit 1 = Sensor 2, thru bit 7 = Sensor 8.
8
(0x08)
Power Source
Number
1 or 6 Source number for the requested layer.
9
(0x09)
Accumulated Layer
Time
4 or 24 Seconds since "Ready"