INFICON IC6 Thin Film Deposition Controller - Manual (Page 241)

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IC6 Operating Manual
11.4.4 Configure the Process
(See Chapter 6, Process Setup .)
Assign a different one of the six unique materials defined in step 3 to layers 1 to 6.
If crosstalk correction is required between two sequential layers, set the CoDep
parameter for the first of those two layers to Yes and enter values for Sensor Cal
Thickness on the material Sensor page or use the Cross Talk procedure in the
Maintenance screen. A Start command starts both layers that are linked by
co-deposit.
11.4.5 General Parameters
(See Chapter 7, General Parameters .)
1 Set Layer to Start to 1.
2 Set Source DAC Required to No.
3 Set Auto Start Next to No.
4 Set Max Concurrent Layer to 6
5 Set up Thickness Eq 1, 2 and 3 if desired to use in a logic statement.
11.4.6 Logic Functions Table
Table 11-1 Logic functions table
Cygnus
# is Channel number
IC6
IF (Events)
(see section 9.3 on page 9-7 )
Rise/Soak n # Rise/Soak n ON Layer#, Material# or Source#
Ready # Ready ON Layer#, Material# or Source#
Substr Shtr # Deposit ON Layer#, Material# or Source#
Deposit # Deposit ON Layer#, Material# or Source#
IF NOT (Event) # No direct equivalent, negated events may not be used with
the ON connector, but two linked statements may be close.
For example,
#1 If (Event) THEN (blank)
#2 If NOT (Statement #1) THEN (Actions)