INFICON IC6 Thin Film Deposition Controller - Manual (Page 214)

10 - 44
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
10
(0x0a)
Deposit Average
Rate
4 or 24 KÅ Based on Averaging Time
parameter. Only available when in a
control state.
11
(0x0b)
Deposit Average
Power
4 or 24 % Based on Averaging Time
parameter. Only available when in a
control state.
12
(0x0c)
Raw Rate 4 or 24 Å/S
13
(0x0d)
One Minute
Averages for Rate &
Power
8 or 48 Returns a 'No Data Error' if not enough
data to do a one minute average of the
rate or the power
14
(0x0e)
Rate Deviation /
power output trend
Varies with
# of data
points
… Number of bytes in the response.
Average values from the operate screen
graph.
Format of each data point.
15
(0x0f)
State before Suspend 1 or 6 See encodes in section 3.5 on page
3-32 . If not currently in Suspend, will
return "No Data Error"
16
(0x10)
Data Log 76 or 456 Multiple pieces of
information
See section 3.6.10 on page 3-43 for
order of data.
17
(0x11)
Data Log with Xtal
History
3,148
or
18,888
for 12 crystals in
8 sensors>.
See section 3.6.10 on page 3-43 for
order of data. Length of response = 76
bytes Data Log +
3072 bytes Xtal History
Xtal History = 32 bytes per crystal, 12
crystals in 8 sensors = 33*12*8=3072
bytes
Table 10-13 Status layer (continued)
SL
Command
ID
Description
Number of
bytes in
the
response
Data Returned Notes