INFICON IC6 Thin Film Deposition Controller - Manual (Page 87)

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IC6 Operating Manual
12. RATE RAMP 2 Rate control, desired rate changing. [New
Rate 2, Start Ramp 2, Ramp Time 2] Active Active 11
13. TIME POWER Crystal failed; source maintained at
average control power and average rate
prior to crystal failure. [Failure Actions] Active Inactive 12
14. Manual Manual is entered via front panel key or
remote communications command.
Thickness is incrementing if source shutter
is open. The source power is controlled by
the hand-held controller or remote
communications
Active or
Inactive
depending
on the state
when
manual is
entered.
Shutter can
be opened
or closed by
the operator
via remote
communi-
cations
during
manual.
Active
Shutter can
be opened
or closed by
operator via
remote
communi-
cations
during
manual.
13
15. (Non Deposit
Control) NonDep
CNTL
The state is entered after the pre-deposit (if
"Dep after Pre-dep" parameter set to no) or
via external stimulus (remote command,
digital input) or after deposit if "On Final
Thickness" set to Non-Deposit Control.
Thickness is not incrementing. The source
power is controlled to the desired rate by
the control loop.The state is ended via
external stimulus. Inactive Active 14
16. NonDep Hold Non-deposit hold is entered when in
non-deposit control and there are no
available crystals to continue the control if
the time power option had been chosen.
Non-deposit hold can also be entered from
time power using the RL3 Remote
command. Thickness is not incrementing.
The source power is maintained at the
average control power prior to the crystal
failure. Both aggregate rate and power can
be adjusted via. remote communications.
The state is ended via external stimulus. Inactive Inactive 15
17. FEED RAMP Source changing to Feed Power level.
[Feed Power, Feed Ramp Time] Inactive Inactive 16
18. FEED Source maintained at Feed Power level.
[Feed Time] Inactive Inactive 17
Table 3-2 State descriptions (continued)
STATE CONDITION RELAY CONTACT
STATUS
REMOTE
COMM
ENCODES
Source
Shutter Sensor
Shutter