INFICON IC6 Thin Film Deposition Controller User Manual

Page 273

15 - 3

IC6 Operating Manual

Abbr(eviated)
Average X..X

During a rate control state, a
crystal failure occurred after
more then one minute but
before the number of minutes
specified in the parameter
Time Power Averaging Time.
The time to average the rate
and power is less then
requested.
X = Material

When a new layer is started.
Stop/Reset

All

0x0000,2000
0000,0000

No or Neg. Average
X ... X

Then entering time power of
non deposit control and there is
not enough data to calculate
and average rate or power.
X = material

As the layer is unloaded

All

0x0000,1000
0000,0000

Time Pwr (Power)
Complete X

Time Power was active when
the Material completed.
X = Material

Another layer overloads the
layer that completed in Time
Power

All

0x0000,0800
0000,0000

Clock Hold

A clock hold has been set via a
Digital Input, Logic Action or
remote communication
command.

A clock hold has been cleared
via a Digital Input, Logic Action
or remote communication
command.

All

0x0000,0400
0000,0000

End Of Process

The last active layer of the
process is complete.

A new process or the first layer
of the active process starts.
Stop/Reset

All

0x0000,0200
0000,0000

CoDep Not
Calibr(ated)
X…X

The co-deposited materials do
not have calibrated thickness
values entered in the material
setup for all active sensors.
Therefore, the Cross Talk
calibration is un-calibrated.
X = Material

Material parameter Cal
Thickness values are entered
for all active sensors either
manually or via automatic
calibration.
Layer parameter Co-Dep is set
to No.

All

0x0000,0100
0000,0000

One Layer Tagged

When First tag is set for layer
editing

When second tag is set for
layer editing.
When leaving layer editing
pages
After UnTag layers function key
is pressed.

Process 0x0000,0080

0000,0000

Layers Tagged

When second tag is set for
layer editing

When leaving layer editing
pages
After UnTag layers function key
is pressed.

Process

0x0000,0040
0000,0000

(CoDep) Too Many
Layers

When attempting to load two
CoDep layers during a reset
and only one layer is allowed.

After a sucessful reset.

All

0x0000,0020
0000,0000

Table 15-1 Status messages (continued)

Status Message

Set

Cleared

Screen

Remote
Comm.
Encode