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3 sensor information, 1 sensor information rate/xtal display description, Figure 3-7 – INFICON IC6 Thin Film Deposition Controller User Manual

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Figure 3-7 6 layer display

3.3.3 Sensor Information

3.3.3.1 Sensor Information Rate/Xtal Display Description

NOTE: N/A (not available) will be displayed in these fields for diabled features or

for sensors not in use.

Figure 3-8 Rate/Xtal display