INFICON IC6 Thin Film Deposition Controller - Manual (Page 272)

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IC6 Operating Manual
Min Power X..X While in a rate control state,
whenever the source power
reaches the programmed
minimum power.
This message doesn’t appear if
the Minimum power is
programmed for 0.0%.
X = Material When the source power is
greater then the programmed
minimum power or when the
IC6 leaves rate control. All 0x0200,0000
0000,0000
Crystal Switch(ing)
X..X A multi crystal sensor is
switching to a new crystal.
X = Sensor The sensor switching has
reached its next position.
When replaced with Switcher
Error message All 0x0100,0000
0000,0000
Crystal Sw(itcher)
Fail X..X A crystal position was not
reached in the time allotted for
a crystal switch.
X = Sensor The sensor switching has
reached its next position.When
replaced with switcher error
message All 0x0080,0000
0000,0000
Carousel Open X..X The Crystal12 carousel is not
detected as in place.
X = Sensor
When the carousel is detected
or when the sensor type is set
to something other than
Crystal12. All 0x0040,0000
0000,0000
Control Delay X..X When the Delay option is set to
Control and a material enters
the control delay.
X = Material The control delay is complete. All 0x0020,0000
0000,0000
Transfer Delay X..X Sensor Shutter delay for a
transfer sensor is active.
X= Material The transfer delay is complete. All 0x0010,0000
0000,0000
RateWatcher Delay
X..X When RateWatcher is turned
on, the active state is
displayed. Only one state per
material can be active at a
time.
X= Material When RateWatcher is inactive
or as the RateWatcher state
changes. All 0x0008,0000
0000,0000
RateWatcher Hold
X..X 0x0004,0000
0000,0000
RateWatcher Sample
X..X 0x0002,0000
0000,0000
Soak Hold Pre Con
Y.....Y
A Soak Hold condition is active
Y = Material
The Soak Hold condition is no
longer active
All
0x0001,0000
0000,0000
Soak Hold 1 Y …Y 0x0000,8000
0000,0000
Soak Hold 2 Y …Y 0x0000,4000
0000,0000
Table 15-1 Status messages (continued)
Status Message Set Cleared Screen Remote
Comm.
Encode