INFICON IC6 Thin Film Deposition Controller - Manual (Page 206)

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IC6 Operating Manual
10.4.22 Query Process Layer Parameter
Command: QP
Command ID = See Table 10-10 .
Process Number = 1 - 50
Layer Number = 1 - 200
Response = |
Type of response depends on command ID, see Data Type column in Table 10-10 .
10.4.23 Update Process Layer Parameter
Command = UP
Command ID = See Table 10-10 .
Process Number = 1 - 50
Layer Number = 1 to 200
Parameter Value = | Type of value depends on command ID,
see Data Type column in
Table 10-10 .
Response = None (Just header and trailer)
Table 10-10 Process layer parameters
QP UP
Cmd ID
Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type Notes
Update Restrictions
and Display Notes
1
(0x01)
Material 0/ 32/ 0 Integer 0 = Layer is not defined Update not allowed if active
process is running
2
(0x02)
(Final Thickness)
Final Thick
(KÅ)
0.0/
999.999/
0.0
REAL_5F32
3
(0x03)
(Thickness Limit)
Thick Limit
(KÅ)
0.0/
999.999/
0.0
REAL_5F32