INFICON IC6 Thin Film Deposition Controller - Manual (Page 113)

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IC6 Operating Manual
DEAD TIME . . . . . . . . . . . . . . . . . . . 0.010 to 9999.99 s
This value is defined as the time difference between a change in % power and
the start of an actual change in rate. The default value is 1.0. This parameter is
disabled if the CONTROL LOOP option parameter is set to 0 (NonPID).
Figure 5-5 Control dead time
SOURCE . . . . . . . . . . . . . . . . . . . . . 1,2,3,4,5,6
This parameter determines which of the six sources, defined in the Source Set-
Up display, is to be used for the material being defined. The default is 1. This
parameter cannot be changed while a process is running.
MAXIMUM POWER . . . . . . . . . . . . . 0.01 to 99.99%
This parameter is used to set the maximum permissible % power level. The
control voltage output will not exceed this limit. The default value is 90.00%.
MAX POWER OPTION . . . . . . . . . . Continue (0), Post-Dep (1), Stop Proc (2),
Suspend Mat (3)
This parameter provides a safety feature.
0 = Continue. Allows the layer to continue in its current state.
1 = PostDeposit. The layer will proceed to the programmed post deposit
state(s).
2 = Stop. Process will stop. Source control voltages for all layers are set to zero.
3 = Suspend. Source control voltage for the layer is set to zero.
The default setting is Stop Proc (2).
TIME
INCREASE POWER
RATE INCREASE
Control DT
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TIME
INCREASE POWER
RATE INCREASE
Control DT
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Rate
Power