INFICON IC6 Thin Film Deposition Controller - Manual (Page 92)

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IC6 Operating Manual
crucible into position. This will be signified on the OPERATE screen by the state
indicator CRUCIBLE SW(ITCH). The layer sequencing will continue on to
Pre-condition Rise Time after either the turret delay time expires or an input
indicates the turret is in position, depending on which option is chosen. The specific
method used is determined by the parameter Turret Feedback on the SOURCE
screen.
NOTE: If the source has been idling at a nonzero power when the START is
initiated, the power will be dropped to zero before the crucible is changed.
3.6.2.1 Example: Programming Turret Source Crucible Selection
Interfacing a turret source controller to the IC6 requires both hardware connections
to the turret controller and properly defining certain IC6 parameters.
Proceed to the SOURCE screen and choose the source that is going to be defined
as the turret source. This is accomplished by Editing the chosen source as follows:
1 Designate the Number of Crucibles; for example, four.
2 Select the Crucible Output. This defines the number of the first relay that
encodes the crucible number selected by the active layer. Relays are defined
sequentially with the first relay containing the least significant bit (LSB). The
greater the number of crucibles selected, the greater the number of relays
required. The number required is based on binary encoding (actual coding is
binary -1, with 00 representing position 1 and 11 representing position 4). Any
unused sequence of relays may be used if it is long enough to provide sufficient
selections. Outputs are NO (Normally Open).
3 Determine whether Turret Feedback is desired. This allows the turret position
controller to stop further IC6 processing until the requested turret position is
satisfied. If chosen, a turret input must be connected to the turret position
controller’s feedback signal.
Enter a Turret Delay Time which allows an adequate time for positioning to take
place. Once the delay time has expired, IC6 state processing continues.
4 The selection of a particular crucible for a layer is defined in the process page.
5 Select the process to modify.
6 Program the particular Crucible Number for each layer.
Example:
Layer 1: Cruc(ible) Number = 1
Layer 2: Cruc(ible) Number = 2
Layer 4: Cruc(ible) Number = 4