INFICON IC6 Thin Film Deposition Controller - Manual (Page 204)

10 - 34
PN
07
4-
50
5-
P1
F
IC6 Operating Manual
115
(0x73)
Failure Action 1/ 4/ 2 Encode 1 = PostDp 2 = Stop
3 = Suspnd 4 = TimePw
Visible only if Multipoint is
set to No. Update not
allowed when transfer
sensor or backup sensor
is running.
116
(0x74)
CrystalTwo
Tooling (%)
1.0/
999.9/
100.0
REAL_4X1 Visible only if Multipoint is set to No.
Gray font if Sensor Type is not CrystalTwo
117
(0x75
Xtal Position First 0/ 12/ 0 Integer Visible only if Multipoint is set to No.
Gray font if Sensor Type is Single, CrystalTwo or Generic
118
(0x76)
Xtal Position Last 0/ 12/ 0 Integer Visible only if Multipoint is set to No.
Gray font if Sensor Type is Single, CrystalTwo, or Generic
119
(0x77)
Backup Sensor 0/ 8/ 0 Integer 0 = No backup sensor.
Visible only if multipoint is set
to No.
Backup sensor cannot be
equal to the sensor
parameter.Update not
allowed if material is
running.
120
(0x78)
Backup Tooling
(%)
1.0/ 999.9/
100.0
REAL_4X1 Visible only if Multipoint is set to No.
Gray font if Backup Sensor is set to 0.
121
(0x79)
Quality Percent
(%)
0/ 99/ 0 Integer
122
(0x7a)
Quality Counts 0/ 99/ 0 Integer
123
(0x7b)
Stability Single
(Hz)
0/ 9999/ 0 Integer 1-24 are excluded
124
(0x7c)
Stability Total
(Hz)
0/ 9999/ 0 Integer 1-24 are excluded
125
(0x7d)
Recorder Output 0/ 12/ 0 Integer 0 = No recorder Not allowed to be the
same as a source DAC
126
(0x7e)
Recorder Function 0/ 3/ 0 Encode 0 = Filtered Rate 1 = Thick
2 = RateDev 3 = Power
Gray font if recorder
output set to 0
127
(0x7f)
Recorder Range 0/ 99999/
100
Integer Gray font if recorder output is set to 0 or Recorder Function
is Power or Rate Deviation
Time Note: Times are displayed as mm:ss. Times are stored as seconds.
The maximum number of seconds is 5999. This would be displayed as 99:59.
Table 10-9 Material parameters (continued)
QM UM
Cmd ID Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type Notes
Update Restrictions
and Display Notes