4 part 3: install the new neg pump – INFICON HAPSITE Smart Plus Chemical Identification System User Manual
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HAPSITE Smart Plus Operating Manual
7
Place the HAPSITE on the Service Module and lock down with the black side
latches. Refer to
section 2.8.2, Placing the HAPSITE on the Service Module,
for additional instructions, if needed.
8
Continue on to
section 16.7.4, Part 3: Install the New NEG Pump, on page
.
16.7.4 Part 3: Install the New NEG Pump
WARNING
Gloves must be worn while performing all of the
following steps. Wear safety glasses and appropriate
PPE according to the MSDS when handling chemicals.
1
Wearing safety glasses and gloves, clean the manifold flange with methanol on
a lint free wipe. See
Figure 16-26
.
Figure 16-26 Cleaning Manifold Flange
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