INFICON HAPSITE Smart Plus Chemical Identification System - Manual (Page 484)

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HAPSITE Smart Plus Operating Manual
Figure 15-10 Ion Pump Status Window
Turbo & R.P. Status . . . . . . . . . . . . Displays the Turbo & R.P. Status. See Figure
15-11 .
Figure 15-11 Turbo & Roughing Pump Status Window
Service . . . . . . . . . . . . . . . . . . . . . . Contains controls to Activate NEG, Vent
HAPSITE and Bakeout NEG. See Figure
15-12 .
Figure 15-12 Service Window